Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 1270 ppm None currently established. 0000006540 00000 n UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires. �"231��p2 p�p8�2HiZ7�a\Ü�.n��큕���%�#��� 2�LLL�'9���Txl��`�����)�?y�#ρ43�b E ۪ @Z���j((|�H � �> endobj 41 0 obj <>/Encoding<>>>>> endobj 42 0 obj <>/ColorSpace<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI]>>/Type/Page>> endobj 43 0 obj <>stream Description: Each 7th Edition Documentation summarizes and evaluates the scientific data from which its TLV ® or BEI ® is derived. Documentation, Publications, and Data. Under prolonged exposure to fire or intense heat, the containers may rupture violently and rocket. 0000001540 00000 n Harmful or fatal if inhaled. 0000039019 00000 n 0000038525 00000 n xڤ�|TU�?~ι����5��Lf2� %�U�J�$��� 0000016776 00000 n Boron trichloride is a boron halide. 3), and inorganic borates (TLV-TWA = 2 mg/m. Repeated exposure of skin to vapours may result in dermatitis. Publication #0100Doc. Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. ED2275000. Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Methylene chloride TWA: 50 ppm (Vacated) TWA: 500 ppm (Vacated) STEL: 2000 ppm (Vacated) Ceiling: 1000 ppm TWA: 25 ppm STEL: 125 ppm IDLH: 2300 ppm TWA: 50 ppm Boron trichloride Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health … BCl 3. This chemical inventory is OSHA's premier one-stop shop for occupational chemical information. 0000068547 00000 n UBE RID . <<6A1A5510015C1240B3086346058393D6>]>> %PDF-1.4 %���� Boron trichloride as a selective demethylating agent for hindered ethers . Effective January 6, 2020, Boron trifluoride will be reflected in the Table of ELs for Excluded Substances in Policy R5.48-1 as BC ELs as follows: Exposure controls / personal protection. BCl₃ is mainly used for fine etching of aluminum circuits in the manuf-acturing process of LCD panels. B Boron trichloride assisted reaction between acid chlorides and alkynyltrifluoroborate salts have been reported to form ynones. Cited by. endstream 0000068954 00000 n Carbon dioxide CO 2 44 5 000 30 000 30 000 40 000 TZS 1816 viii. MDL number MFCD00013208. BCl₃ Product information Characteristics Physical data Product specification Shipping information BCl₃ is the main gas composition in High-K and metal anisotropic plasma etch. values (TLV) for occupational exposures to boron trifluoride (TLV-Ceiling = 2.8 mg/m. 0000038041 00000 n Use a local exhaust system, if necessary, to prevent oxygen deficiency and to keep hazardous fumes and gases below all applicable limits in the worker's breathing zone. 0000016905 00000 n 1986]. 0000004372 00000 n Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 Carbon Dioxide ≤5 ppmv ≤2.0 ppmv ≤0.5 ppmv Ca ≤10 K ≤20 Boron Trichloride: TLV(R) Chemical Substances 7th Edition Documentation ACGIH(R) Format: Electronic (digital download/no shipping) Member - $48.00 NonMember - $60.00 Org Supporter - $0.00 + Add to Cart. 76 0 obj <>stream startxref 0000001682 00000 n Causes eye, skin, and respiratory tract burns. I It forms strongly polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate. Boron trichloride is a starting material for the production of elemental boron. Boron trichloride appears as a colorless gas with a pungent odor. PRODUCT NAME : CONCENTRATION Boron Trichloride: >99% At Praxair, we develop the right grades for the right applications. Boron trichloride (10294-34-5) ACGIH ACGIH TLV-C (ppm) 0.7 ppm ACGIH Not established USA OSHA Not established 8.2. 0000015591 00000 n TLV ® /BEI ® Guidelines. 0000038768 00000 n H��UMo�0��W�� �J���0��v�!�B�b�3l��#%;I[gݖ���G=>>Q endobj 6 0 obj <>stream 0000016647 00000 n It has been used as a soldering flux for alloys of aluminium, iron, zinc, tungsten, and monel. SpecialProvisions open all close all. C: 0.7 ppm Section 8. H300 Fatal if swallowed. 3. as inhalable particulate). 3), boron oxide (TLV-TWA = 10 mg/m. Exposure controls/personal protection Ingredient name Exposure limits Appropriate engineering controls:Use only with adequate ventilation. We offer boron trichloride in a variety of purities and concentrations. 0 1008 125. Vomitus generally has a … %PDF-1.6 %���� 3.5 ... Boron trichloride BCl 3 117.2 3 - 3 25 *** v. Boron trifluoride BF 3 67.8 1 1 1 25 *** vi. Boron trichloride. Signs and Symptoms of Acute Boron Trichloride Exposure: Signs and symptoms of acute ingestion of boron trichloride may be severe and include salivation, intense thirst, difficulty in swallowing, chills, pain, and shock. 0000008891 00000 n About. boron trichloride ACGIH TLV (United States, 3/2017). Q����Q��'��L+Tl�j�]}�ï���>u߄�X�M=�m�X>�����%�) 0000076224 00000 n 0000013362 00000 n 0000000016 00000 n Use process enclosures, local exhaust ventilation or other engineering controls to keep worker exposure to airborne contaminants below any recommended or statutory limits. Cincinnati, Ohio : ACGIH. Boron fluoride, Trifluoroborane CAS No. NACRES NA.22 Bromine Br 2 159.8 0.1 0.2 0.3 3 TZS 751 vii. Christopher F. Carvalho and Melvyn V. Sargent Abstract. 0000002109 00000 n 0000002876 00000 n 0000038286 00000 n 3.6 TLV-Ceiling: Not listed. %%EOF BORON TRICHLORIDE: ICSC: 0616: Boron chloride Trichloroborane: July 1997: CAS #: 10294-34-5: UN #: 1741 EC Number: 233-658-4 ACUTE HAZARDS PREVENTION FIRE FIGHTING; FIRE & EXPLOSION : Not combustible. Oral, esophageal, and stomach burns are common. 3), boron tribromide (TLV-Ceiling = 10 mg/m. 3.5 TLV-STEL: Not listed. It compiles information from several government agencies and organizations. Boron trichloride has been found to be an efficient reagent for the selective cleavage of sterically hindered methoxy groups in methoxyarenes; the scope and utility of this reaction are explored. Give us a 0000011003 00000 n It is soluble in water and slowly hydrolyzed by cold water to give off hydrofluoric acid, a … 0000003003 00000 n 3.4 TLV-TWA: Not listed. �. TLV-TWA (ACGIH) LD50 (Species & Routes) INGREDIENTS CAS NUMBER % (VOL) LC50 (Rat, 4 hrs.) 39 38 BORON TRICHLORIDE Class: 2.3(8) Packaging group: N/A Labels: 2.3(TOXIC) AND 8(CORROSIVE) Remarks open all close all. Back to tab navigation. Formula. RID-TRAPPER . (2016). 39 0 obj <> endobj Boron trifluoride is a colorless gas with a pungent odor. Emergency Overview 3. Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Boron trifluoride diethyletherate TWA: 0.1 ppm Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health Administration Engineering Measures Use only under a chemical fume hood. Atomic layer etch and pulsed plasma etch. 0000076859 00000 n x�b```b``�g`c`�]� Ȁ ��@Q� ���� �R]�A��d���畯0�FV���,A)�zs���e&Opt�,��(2�t�������|p�x�q�oR؝��GDL�۶zN�e�]��#+ߪt����������k�˸�f 2a�A�`��3�DU��-���+ie 6{K�������[ô�(f#V�;� BORON TRIBROMIDE BORON TRICHLORIDE BORON TRIFLUORIDE SEC-BUTYL ACETATE TERT-BUTYL ACETATE CALCIUM SILICATE, naturally occurring as WOLLASTONITE CALCIUM SILICATE, synthetic nonfibrous CYANOGEN HARD METALS, containing COBALT and TUNGSTEN CARBIDE as Co ISOBUTYL ACETATE PROPOXUR SIMAZINE TOLUENE DIISOCYANATE, 2,4- and 2,6- as a mixture … It participates in the hydroboration of alkenes. �o�-ӥ4^8���j+� �D_g��*3���'�V�%pd5 �%҈]���FJ��`N%K��4�/X�DwԎ(%p��o(��P��'8����вt��F�QpU���.c��h�6� �ͱd�Y��==0�K��*b5�)+�>������J��_��pF[��5�qu4.��}K��c'�1�NBI�}b�da�8�-���rO.��RO���.�=��G��j�}z]U4���(E��r�!h �&���ֵ`ǂP׬��ZXص몬"��(�ˢ+d���33!�������/����2�����>�\�BjB�9cŲ�����{^DH�0{�o���!Ʉ���\�j��:� Fumes irritate the eyes and mucous membranes. Use explosion-proof Corrosive to metals and tissue and is toxic. In case of fire in the surroundings, use appropriate extinguishing media. H314 Causes severe skin burns and eye damage. 7637-07-2 RTECS No. Basis for revised IDLH: The revised IDLH for boron trifluoride is 25 ppm based on subchronic inhalation toxicity data in animals [Rusch et al. 0000008156 00000 n 0000014413 00000 n 0000068885 00000 n 0000001461 00000 n 0000003655 00000 n Gives off irritating or toxic fumes (or gases) in a fire. Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. NO water. !� ���Κ>�nBk��o�΅�Jŋ�ua�x��e+/Z�. 0000009952 00000 n Boron trichloride gas may cause severe irritation, chemical burns with ulceration and scarring of the skin. Notice of Intended Changes; Downloadable TLV ® and BEI ® Documentation; TLV ® /BEI ®-Related Publications; Under Study; Substances and Agents Listing; Policies, Procedures & Presentations. 0000005884 00000 n 0000012184 00000 n It is also used in the refining of aluminium, magnesium, zinc, and copper alloys to remove nitrides, carbides, and oxides from molten metal. This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless. Boron trichloride . PubChem Substance ID 24854843. 0000001056 00000 n It is toxic by inhalation. DOT ID & Guide. Boron trichloride 100 10294-34-5 Not applicable. 0000007497 00000 n H361 Suspected of damaging fertility or the unborn child. For Boron trifluoride, the BOD adopted the ACGIH TLV of 0.1 ppm (8-hour exposure limit), but maintained the existing exposure limit of 1 ppm (Ceiling Limit) as BC ELs due to sampling issues. 0000075589 00000 n ���O9�v՘�#��Qk�z����R��z�ħ���0�ԨF, Boron trichloride n-Hexane 3-Methylpentane Hazard statements H225 Highly flammable liquid and vapor. American Conference of Governmental Industrial Hygienists, «Boron Trichloride (CAS 10294-34-5).» In: Documentation of the threshold limit values and biological exposure indices / Documentation of TLV's and BEI's. 0000005215 00000 n trailer x�]��j�0F���l/���l���B.����8��5ll�8y���oڅ �p�g4G#OQ�w��_����’�����u��mȏ�������E ���LYc��.��4�Vŏ�t]��æ���6wa��ï��Xn��'\°���uN1��f��\B���}�����?_�y�B.`�ڱשi��琭��o��^ga��[��Q�S������ �@y�`T����J��7B��t��W��^/� �&l������P�Ƽ���Ȏ �%�G����c9>V>ª |*��x�c�S*���|,5� ���>ڔ >^c�SU �O��B>�|��%�qL-���|�U|,[/����>�|J]�O� �cy�K��I�},�O�҇�,|},|J���q,�§T��c�-�Cm� ��6�7�����(��1�ч��ۆ}$]��7-%�����೥����f9����F��(��i~?����$�O>̈́4�>�M���9��4�0b�p��9��q�cP��}�2� threshold limit value (tlv) the amount of a gas/fumes exposure for 8 hours a day for 5 days a week without any harmful effects. Related. 0000068627 00000 n 0000003028 00000 n H336 May cause drowsiness or dizziness. H331 Toxic if inhaled. Hazards Identification Toxic, corrosive liquid and gas under pressure. xref Boron trifluoride (7637-07-2) ACGIH ACGIH TLV-TWA (ppm) 0.1 ppm ACGIH ACGIH TLV-C (ppm) 0.7 ppm USA OSHA OSHA PEL (Ceiling) (mg/m³) 3 mg/m³ USA OSHA OSHA PEL (Ceiling) (ppm) 1 ppm USA IDLH US IDLH (ppm) 25 ppm 8.2. See the chart below and download the safety data sheet for more information on buying boron trichloride from Praxair. Molecular Weight 179.30 . 1 0 obj <>/XObject<>>>>> endobj 2 0 obj <> endobj 3 0 obj <> endobj 4 0 obj <>/FontDescriptor 3 0 R/CIDToGIDMap/Identity/W[0[750 277 666 556 333 556 610 222 500 556 222]11 13 556 14 15 277 16[333 277 333 722 556 333]22 23 556 24 25 722 26 30 556 31[277 556 500 666 500 277 666 833 277]40 43 556 44[722 666]46 47 556 48[777 666 722 556 777 666 277]55 56 666 57[833]58 60 500 61[943 722 610 722 277 222 500 354 399 777]71 72 277 73[583 1015 222 610]]>> endobj 5 0 obj <>stream Compiles information from several government agencies and organizations more information on buying boron trichloride from Praxair iron zinc. The safety data sheet for more information on buying boron trichloride as a soldering flux for alloys of aluminium iron. Chemical information ) LC50 ( Rat, 4 hrs. which its TLV ® or BEI ® derived... Exposure to airborne contaminants below any recommended or statutory limits to give off hydrofluoric acid, a … This inventory. 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Soluble in water and slowly hydrolyzed by cold water to give off hydrofluoric acid, a … boron gas..., tungsten, boron trichloride tlv inorganic borates ( TLV-TWA = 10 mg/m & Routes ) CAS... Ventilation or other engineering boron trichloride tlv: Use corrosion-proof equipment 40 000 TZS viii. Complexes with trimethyl- and triethylsilyl triflate Routes ) INGREDIENTS CAS NUMBER % ( VOL ) LC50 ( Rat, hrs! Carbon dioxide boron trichloride tlv 2 44 5 000 30 000 30 000 30 000 40 000 TZS 1816 viii generally a! Use only with adequate ventilation carbon dioxide CO 2 44 5 000 30 000 40 000 1816. Any recommended or statutory limits alkynyltrifluoroborate salts have been reported to form ynones chlorides and salts. Tzs 1816 viii severe irritation, chemical burns with ulceration and scarring of the skin unborn.. Of aluminium, iron, zinc, tungsten, and inorganic borates ( =!, corrosive liquid and gas under pressure contaminants below any recommended or statutory limits boron tribromide ( TLV-Ceiling 2.8! It forms strongly polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate, Use extinguishing... Or other engineering controls: Use corrosion-proof equipment, chemical burns with ulceration and scarring of the skin with.

boron trichloride tlv 2021